Piezoelectrics in micro and nanosystems: Solutions for a wide range of applications

Muralt, Paul (Laboratoire de Ceramique, Ecole Polytechnique Federale de Lausanne EPFL)

Source: Journal of Nanoscience and Nanotechnology, v 8, n 5, May, 2008, p 2560-2567
ISSN: 1533-4880
Publisher: American Scientific Publishers

Abstract: Piezoelectric thin films have interesting prospects in a number of applications for which miniaturization is a driving force. Miniaturization means higher frequency, or higher resolution, or increased functionality. This paper gives a short review on piezoelectric thin films, their deposition processes, integration, properties and applications in microsystems (MEMS), concentrating on the most frequently investigated piezoelectric thin film materials. Copyright © 2008 American Scientific Publishers All rights reserved. (67 refs.)

terms:  Vapor deposition  -  Concentration (process)  -  Films  -  Materials properties  -  Miniature instruments  -  Piezoelectricity  -  Solids  -  Thick films  -  Thin films