Nanostructure engineering in porous columnar thin films: recent advances

Steele, J.J. (Dept. of Electr. & Comput. Eng., Alberta Univ., Edmonton, Alta., Canada); Brett, M.J.

Source: Journal of Materials Science: Materials in Electronics, v 18, n 4, April 2007, 367-79

ISSN: 0957-4522 CODEN: JSMEEV

Publisher: Kluwer Academic Publishers, USA

Abstract: Glancing angle deposition (GLAD) is a physical vapour deposition method used to fabricate highly functional thin films with an engineerable columnar morphology. Recent developments in GLAD technology have produced columnar nano-structures of increased complexity, including periodic, nanofibrous, perforated, and graded porosity thin films for use in applications ranging from sensors and actuators to optical filters, microfluidics, and catalysis. A brief review of GLAD methodology and historical developments is followed by a discussion of the latest developments in this field (76 refs.)

terms:  nanostructured materials  -  porous materials  -  thin films  -  vapour deposited coatings