Evaluation of functional materials and devices using atomic force microscopy with ultrasonic measurements

Yamanaka, Kazushi (Department of Materials Processing, Graduate School of Engineering, Tohoku University); Kobari, Kentaro; Tsuji, Toshihiro

Source: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, v 47, n 7 PART 3, Jul 18, 2008, p 6070-6076

ISSN: 0021-4922 CODEN: JAPNDE

Publisher: Japan Society of Applied Physics

Abstract: Modem functional materials and devices require thorough testing for safety and reliability. Here, we describe solutions to meet this requirement in the field of scanning probe microscopy, and the most practical approach among them; ultrasonic atomic force microscopy (UAFM), In this review, we focus on evaluation of subsurface defects with scientific and technological importance, such as domains of ferroelectric materials and subsurface delamination of metal electrodes on microdevices. In addition, we show the development and application of the lateral bending (LB) mode and lateral modulation atomic force microscopy (LM-AFM) with applications in nanomaterials including carbon nanotube composites and discuss their future development in combination with UAFM. © 2008 The Japan Society of Applied Physics. (27 refs.)

terms:  Ferroelectric materials  -  Atomic force microscopy  -  Atomic physics  -  Atoms  -  Carbon carbon composites  -  Carbon nanotubes  -  Delamination  -  Materials science  -  Materials testing  -  Microscopic examination  -  Modulation  -  Nanostructured materials  -  Safety testing  -  Scanning probe microscopy  -  Technology transfer  -  Ultrasonics