Nanoelectromechanical systems (NEMS)

The term Nanoelectromechanical systems (NEMS) is used to describe devices integrating electrical and mechanical functionality on the nanoscale. NEMS form the logical next miniaturization step from so-called microelectromechanical systems, or MEMS devices. NEMS typically integrate transistor-like nanoelectronics with mechanical actuators, pumps, or motors, and may thereby form physical, biological, and chemical sensors. The name derives from typical device dimensions in the nanometer range, leading to low mass, high mechanical resonance frequencies, potentially large quantum mechanical effects such as zero point motion, and a high surface to volume ratio useful for surface-based sensing mechanisms. Uses include accelerometers, or detectors of chemical substances in the air. Because of the scale on which they can function, NEMS are expected to significantly impact many areas of technology and science and eventually replace MEMS. As noted by Richard Feynman's in his famous talk in the 60s, There's Plenty of Room at the Bottom, there are a lot of potential applications of machines at smaller and smaller sizes; by building and controlling devices at smaller scales, all technology benefits. Among the expected benefits include greater efficiencies and reduced size, decreased power consumption and lower costs of production in electromechanical systems. In 2000, the first Very Large Scale Integration (VLSI) NEMS device was demonstrated by researchers from IBM. Its premise was an array of AFM tips which can heat/sense a deformable substrate in order to function as a memory device. In 2007, the International Technical Roadmap for Semiconductors (ITRS) contains NEMS Memory as a new entry for the Emerging Research Devices section. Before NEMS devices can actually be implemented, reasonable integrations of carbon based products must be created. The focus is currently shifting from experimental work towards practical applications and device structures that will implement and profit from the use of carbon nanotubes . At this point in NEMS research, there is a general understanding of the properties of carbon nanotubes and graphene. The next challenge to overcome involves understanding all of the properties of these carbon based tools, and using the properties to make efficient and durable NEMS. NEMS devices, if implemented into everyday technologies, could further reduce the size of modern devices and allow for better performing sensors. Carbon based materials have served as prime materials for NEMS use, because of their highlighted mechanical and electrical properties. Once NEMS interactions with outside environments are integrated with effective designs, they will likely become useful products to everyday technologies.

NEMS of  the oscillator

Further information

1. T. Cornelius: Handbook Techniques and Applications Design Methods; Fabrication Techniques; Manufacturing Methods; Sensors and Actuators; Medical Applications. Springer, 2007, p.1350
2. C. P. Poole, F.J.Owens, Introduction to Nanotechnology Wiley-Interscience 2003, p. 400
3. М. Рыбалкина, Нанотехнологии для всех, М. 2005
4. M. Köhler, W. Fritzsche, Nanotechnology: An Introduction to Nanostructuring Techniques, Willey-VCH, 2004
5. A. M. Fennimore et al., Nature 424 (July 2003) 408 – 410
6. Article Nanoelectromechanical systems (NEMS) from Wikipedia, the Free Enciclopedia. Available under the license Creative Commons Attribution-Share Alike.

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